KAWASAKI ROBOTICS NT620
- Specifiche# asse5
- Descrizione del prodotto
The NT series clean robot is designed to give a single robot the reach to tend up to four FOUPs without using a linear axis. The NT series incorporates the next-generation design to handle either 300 mm or 450 mm wafers at a rate of 400 wafers per hour (WPH) without an aligner.
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