AMX floor standing machines are specifically designed for unique polishing, delayering and planarization applications where R&D, prototype and small volume processing is required.

These machines have the kinematics and control to allow development of processes that require precise material removal, flatness and surface finish generation. The menu-driven microprocessor control allows any polishing, delayering or planarization process to be fully optimized. And, for true CMP kinematics, the oscillation system provides 3-axis motion.