Image Pickup Device: 4 Megapixel CMOS Image Sensor Measuring Range: 23.62" x 11.81" x 7.87" Min. Display Unit (Distance): 1 µm Min. Display Unit (Angle): 0.0001° Number of Probes: 2 Measurement Accuracy   Repeatability (Stage Locked): +/- 3 µm Repeatability (Stage Unlocked): +/- 4 µm Indication Error (Stage Locked): +/- 8 µm Indication Error (Stage Unlocked): +/- (10 + L/100) µm Stage   Withstand Load: 55.12 lbs X-Axis Movable Range: 3.94" Rotation Range: +/- 60° Stage Marker   Number of Markers: 6 Marker Light Source: Near-Infrared LED (870 nm) XM-1600 Controller 15" LCD Monitor (1027 x 768) Built-in-Display